MicroMeter Mass Flow Meter

Micro Flow Meters from PneucleusFeatures & Benefits

  • Flow Range: Up to 2000 SCCM
  • Linearity Error: 0.5% FS
  • Repeatability: 0.15% FS
  • Response Time: 40 ms

Specifications

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Digital Model
Linearity ± 0.5%
Repeatability & Hysteresis ± 0.15% FS
Response Time
(to within 1% of set point)
40 msec
Temperature Coefficient
(Deviation from 21ºC Cal Temp)
0.09% / °C Uncompensated
0.005% / ºC Compensated