MicroFlo Mass Flow Controllers

MicroFlo Mass Flow ControllerFeatures & Benefits

  • Flow Range: Up to 2000 SCCM
  • Linearity Error: 0.05 – 1.0% FS
  • Repeatability: ± 0.15% FS
  • Response Time: 40 msec

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Specifications Snapshot

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  Economical Model Standard Model
Linearity 1.0 – 3.0% of Full Scale (Typical) ± 0.05 – 1.0% of Full Scale
Repeatability & Hysteresis Range Dependant ± 0.15% FS
Response Time
(to within 1% of set point)
40 msec 40 msec
Temperature Coefficient
(from 21ºC set point)
0.09% / ºC 0.09% / °C
DETAILED PRODUCT SPECIFICATIONS
Performance
Linearity± 0.05 - 1.0% of Full Scale (Typical)
Repeatability & Hysteresis± 0.15% FS
Temperature Coefficient0.009% / ºC from 21ºC set point
Response Time40 msec (Typical, from 2%-100 FS)
Fluid Requirements:
Calibration GasAny, Non-Corrosive, Customer Specified
Flow RangeFlow Range: Up to 2000 SCCM (He/H2) and 1000 SCCM (other gases)
Pressure Range0-100 psi, Cal Pressure: 25 psi
Internal Leakage10-5 @ 1, 30 and 100 psi (He)
External Leakage2 x 10-6 sccm (He)
Electrical Requirements:
Input Voltage
(single supply)
12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%)
Power Consumption3.0 Watts Maximum
Control & Output Voltage/Signal0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable)
Environmental Requirements:
Operating Ambient Temp.0-50ºC
Storage Temperature-40 to 70ºC
Humidity Range5% - 95% (Relative, non-condensing)
Nominal Temperature21ºC ± 5ºC
Mechanical Configuration:
Input/Output Ports10-32 Threaded (Others, Consult Factory)
DimensionsL: 2.0” W: 1.5” H: 1.85”
Weight5.4 oz
Construction (wetted materials):
ManifoldNickel Plated Aluminum
O-RingsFluorocarbon (Viton®), others at additional cost
Valve ComponentsBrass 360, AISI 300 series, 430 FR Stainless Steel
Flow SensorCeramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only)