Features & Benefits
- Flow Range: Up to 2000 SCCM
- Linearity Error: 0.5% FS
- Repeatability: 0.15% FS
- Response Time: 40 ms
Specifications
View CAD [1]
| Digital Model | |
| Linearity | ± 0.5% |
| Repeatability & Hysteresis | ± 0.15% FS |
| Response Time (to within 1% of set point) |
40 msec |
| Temperature Coefficient (Deviation from 21ºC Cal Temp) |
0.09% / °C Uncompensated 0.005% / ºC Compensated |