Features & Benefits
- Flow Range: Up to 20 SLPM
- Linearity Error: 0.5 – 1.0% FS
- Repeatability: 0.15% FS
- Response Time: 150ms
| DETAILED PRODUCT SPECIFICATIONS | ||
| Performance | ||
| Linearity | 0.5%, 1.0% or 3.0% FS | CS* |
| Repeatability & Hysteresis | 0.15% FS | |
| Thermal Drift | 0.1% FS / °C | |
| Response Time | 150 msec (Typical) | |
| Fluid Requirements | ||
| Calibration Gas | Any Non-Corrosive Gas | CS |
| Flow Range | Up to 20 SPLM | CS |
| Pressure Range | 1-150 PSID | CS |
| Internal Leakage | 1×10-5 sccm @ 1, 30 & 100 PSI | |
| External Leakage | 2 x 10-6 sccm (He) | |
| Electrical Requirements | ||
| Input Voltage | 12V, 15V, or 24V | CS |
| Power Consumption | 2.2 Watts (Max) | CS |
| Control Signal | 0-5V, 1-5V, 0-10V, 4-20mA | CS |
| Output Signal | 0-5V, 1-5V, 0-10V, 4-20mA | CS |
| Environmental Requirements | ||
| Operating Temperature Range | 0°C to 50°C | |
| Storage Temperature | -40°C to -70°C | |
| Relative Humidity (Gas) | 5 to 95% Non-Condensing | |
| Calibration Temperature | 21°C +/- 5°C | |
| Gas Connection | O-ring AS568A-006 or equivalent | |
| Mechanical Configuration | ||
| Input/Output Ports | 1/8″ NPT | |
| Physical Dimensions | L: 5.5″ W: 1.5″ H: 2.8″ | |
| Weight | 13.0 oz | |
| Construction (Wetted Materials) | ||
| Manifold | Nickel Plated Aluminum Polyester |
|
| O-Rings | Flurocarbon (Viton®) | |
| Valve Components | Brass 360, AISI 300 series 430 FR Stainless Steel |
|
| Tubing | Polyeurethane | |
| Sealant | Anaerobic | |
| Flow Sensor | Thermoplastic, Silicon, Silicon Nitrite, Gold, Aluminum Oxide, Epoxy, Fluorocarbon (Viton®) |
|
*CS = Customer Specified
