Mass Flow Controllers

MicroFlo

L: 2.04″ W: 1.50″ H: 1.85″
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MediFlo

L: 2.8″ W: 1.50″ H: 5.50″
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MetaFlo

L: 5.5″ W: 1.50″ H: 2.8″
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MetaFlow Mass Flow Controller
Precision Models
Flow Range* Up to 2000 sccm Up to 20 SLPM Up to 20 SLPM
Linearity Error:** ±0.05 – 1.0% FS ±0.5 – 1.0% FS 0.5 – 1.0% FS
Repeatability 0.15% FS 0.15% FS 0.15% FS
Response Time 40 msec 150 msec 150 msec
OEM (Economical) Models
Flow Range* Up to 500sccm Up to 20 SLPM Up to 20 SLPM
Linearity Error: 1.0 – 3.0% FS 1.0 – 3.0% FS 1.0 – 3.0% FS
Repeatability 0.15% FS 0.15% FS 0.15% FS
Response Time 40 msec 150 msec 150 msec

* Customer-Specified
** Customer-Specified with Cost Impact