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Miniature, High-Precision Vacuum Control for Sensitive Applications

The Pneucleus MicroVC™ Vacuum Controller is engineered for precise, repeatable vacuum regulation in critical applications where stability is essential. With customer-specified ranges from 2.1 to 30 psiA, the MicroVC ensures consistent performance in environments where even slight fluctuations can impact yield, quality, or analytical results.

Compact, robust, and versatile, MicroVC controllers are trusted in semiconductor manufacturing, laboratory research, medical devices, aerospace testing, and industrial automation, delivering reliable vacuum control with minimal footprint.

Features & Benefits

  • Pressure Range: Customer Specified From 2.1 to 30 psiA
  • Linearity Error: 0.5 – 1.0% FS
  • Repeatability: ± 0.08% FS
  • Response Time: Dependent on Volume Size of Pressue Vessel and the Size of Valve… (Consult Factory)

 

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PRODUCT SPECIFICATIONS (Standard)

NOTE: Ask Us About Specification Enhancement

Performance
Pressure RangesAny Customer Specified Flow Range From 2.1 to 30 psiA
Linearity± 0.5 - 1.0% of Full Scale (Typical)
Repeatability & Hysteresis± 0.08% FS
Response TimeDependent on Volume Size of Pressue Vessel and the Size of Valve… (Consult Factory)
Temperature CoefficientTemperature Compensated from 0-55oC
Fluid Requirements:
Calibration GasAny, Non-Corrosive, Customer Specified
Internal Leakage10-5 @ 1, 30 and 100 psi (He)
External Leakage2 x 10-6 sccm (He)
Electrical Requirements:
Input Voltage (single supply)12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%)
Power Consumption2.0 Watts Maximum
Control & Output Voltage/Signal0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable)
Environmental Requirements:
Operating Ambient Temp.0-50ºC (Standard) Ask About Enhancement
Storage Temperature-40 to 70ºC
Humidity Range5% - 95% (Relative, non-condensing)
Nominal Calibration Temperature20ºC
Mechanical Configuration:
Input/Output Ports10-32 Female Thread
DimensionsL: 2.04” W: 1.50” H: 2.11”
Weight7.9 oz
Construction (wetted materials):
ManifoldNickel Plated Aluminum
O-RingsFluorocarbon (Viton®), others at additional cost
Valve ComponentsBrass 360, AISI 300 series, 430 FR Stainless Steel
Pressure SensorCeramic (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide

How MicroVC Vacuum Controllers Work

MicroVC controllers combine precision sensors and electronically controlled valves to actively maintain vacuum levels:

  1. Precision Vacuum Sensors: Continuously monitor system vacuum with high accuracy.
  2. Electronic Control Valves: Make fine adjustments to stabilize pressure and maintain setpoints.
  3. Feedback Control Loop: Compensates for variations in system volume or environmental changes, ensuring stable and repeatable operation.

Note: Response time is influenced by the size of the vacuum chamber and valve configuration. Smaller volumes stabilize faster, while larger systems require slightly longer adjustment. Correct system matching maximizes performance.

Unlike conventional vacuum regulators that provide only coarse adjustments, the MicroVC delivers high-resolution, repeatable vacuum control, minimizing fluctuations and improving overall process reliability.

Key Advantages of MicroVC

  • Precision & Consistency: High repeatability ensures stable vacuum regulation for sensitive processes.
  • Compact Design: Miniature footprint integrates seamlessly into laboratory, industrial, and OEM systems.
  • Flexible Integration: Supports analog and digital control signals, including VDC, mA, and RS-232.
  • Durable Construction: Nickel-plated aluminum manifolds and stainless-steel components ensure long-term reliability.
  • Environmental Stability: Temperature-compensated operation provides dependable performance across varying conditions.
  • Process Reliability: Minimizes fluctuations, reduces recalibration, and enhances system uptime.

These advantages allow engineers to achieve precision, efficiency, and reliability in a wide range of vacuum-based applications.

Applications of MicroVC Vacuum Controllers

  • Semiconductor Manufacturing: Maintains ultra-stable vacuum for wafer handling, deposition, etching, and other sensitive processes, ensuring consistent yield.
  • Laboratory & Research Systems: Delivers precise and repeatable vacuum control for analytical testing, calibration, and experimental setups.
  • Medical & Pharmaceutical Devices: Supports devices where precise vacuum regulation is critical for patient safety and product quality.
  • Industrial Automation: Enhances repeatable vacuum control for automated handling, assembly, and packaging systems.
  • Aerospace & Defense Testing: Provides reliable vacuum regulation in high-performance testing and evaluation environments.

The MicroVC combines miniature design, high precision, and broad versatility to support demanding vacuum applications across industries.

Important Questions to Choose Your MicroVC

What vacuum range does your system require?

MicroVC supports custom ranges from 1 to 30 psiA to match your application needs.

Which integration signals are required?

Compatible with both analog and digital outputs, including VDC, mA, and RS-232 for flexible system connectivity.

What environmental or material considerations apply?

MicroVC operates reliably in temperature-compensated conditions and is built with durable, chemically resistant materials for laboratory and industrial use.

Still unsure? Contact Pneucleus for guidance in selecting the optimal MicroVC configuration for your system.

Why Choose Pneucleus MicroVC™

  • Engineered for Precision: Compact vacuum control without compromising accuracy or repeatability.
  • Customizable Solutions: Tailored vacuum ranges, material compatibility, and signal outputs to match your system.
  • Trusted Expertise: Built on Pneucleus’ experience in precision vacuum technology for laboratory and industrial applications.

Request a quote or speak with an engineer today to explore how MicroVC™ can be customized to meet your unique vacuum control requirements.

Frequently Asked Questions

How is MicroVC different from standard vacuum regulators?

Standard regulators allow only coarse adjustments. MicroVC provides fine, repeatable vacuum control, ensuring stability and consistency in sensitive processes.

What environments can MicroVC operate in?

Temperature-compensated operation and durable construction make MicroVC suitable for laboratory, industrial, and OEM applications.

How does MicroVC help reduce maintenance?

By delivering stable vacuum control, it reduces process fluctuations, minimizes wear, and lowers the frequency of recalibration, improving overall system uptime.

Experience reliable, high-precision vacuum control in a miniature form factor.