Precision Gas Flow Measurement in Ultra-Compact Systems
In laboratories, OEM devices, and high-tech industries, space is often the most limited resource. Traditional mass flow meters can be bulky, difficult to integrate, and unsuitable for micro-scale applications. The MicroMeter™ Subminiature Mass Flow Meter from Pneucleus Technologies addresses this challenge by combining precision, reliability, and compact design in a device built for space-constrained environments.
Engineered for micro-scale systems, MicroMeter delivers the same advanced thermal mass flow measurement as larger instruments, enabling accurate gas control even in the tightest installations. Its subminiature profile empowers engineers and researchers to maximize system density without compromising accuracy or performance.
Features & Benefits
- Flow Range: Customer Specified Up to 6000 SCCM
- Linearity Error: 0.5% FS
- Repeatability: 0.08% FS
- Response Time: 20 ms
PRODUCT SPECIFICATIONS (Standard)
NOTE: Ask Us About Specification Enhancement
| Performance | |
|---|---|
| Flow Ranges | Any Customer Specified Flow Range Up to 6000 SCCM |
| Linearity | ± 0.5 - 1.0% of Full Scale (Typical) |
| Repeatability & Hysteresis | ± 0.08% FS (Typical) |
| Response Time | 20 msec (Typical, from 0%-100 FS) |
| Temperature Coefficient | 0.09% / ºC from 20ºC Ambient Cal Temp |
| Fluid Requirements: | |
| Calibration Gas | Any, Non-Corrosive, Customer Specified |
| Pressure Range | Up To 100 psiA, Cal Pressure: 14.7 psiA (Typical) |
| Internal Leakage | 10-5 @ 1, 30 and 100 psi (He) |
| External Leakage | 2 x 10-6 sccm (He) |
| Electrical Requirements: | |
| Input Voltage (single supply) | 12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%) |
| Power Consumption | 0.75 Watts Maximum |
| Output Voltage/Signal | 0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable) |
| Environmental Requirements: | |
| Operating Ambient Temp. | 0-50ºC |
| Storage Temperature | -40 to 70ºC |
| Humidity Range | 5% - 95% (Relative, non-condensing) |
| Nominal Temperature | 20ºC ± 5ºC |
| Mechanical Configuration: | |
| Input/Output Ports | 10-32 Treaded Female w/Oring counterbore |
| Dimensions | L: 2.00” W: 1.50” H: 2.00” |
| Weight | 3.2 oz |
| Construction (wetted materials): | |
| Manifold | Nickel Plated Aluminum |
| O-Rings | Fluorocarbon (Viton®), others at additional cost |
| Flow Sensor | Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only) |
Why Compact Flow Measurement Matters
Modern equipment such as analytical instruments, semiconductor tools, and manifold gas delivery systems often pack numerous components into tight configurations. Even a small deviation in flow can affect sensitive processes.
The MicroMeter ensures that precision is never sacrificed for size:
- Optimized for Tight Spaces: Fits into compact installations where traditional meters cannot.
- Uncompromised Accuracy: Maintains reliable measurements across a wide range of flow rates.
- Seamless Integration: Designed to simplify installation and reduce system complexity.
- High Responsiveness: Quickly detects and compensates for flow variations in real-time applications.
The Technology Behind Miniature Flow Systems
At the core of the MicroMeter is digital thermal mass flow technology, a method that measures the heat carried by flowing gas to determine precise mass flow rates. This approach eliminates the need for volumetric corrections, ensuring consistent results regardless of pressure or temperature fluctuations.
The instrument’s internal architecture is optimized to:
- Minimize dead volume and improve response time
- Reduce energy consumption while maintaining signal stability
- Facilitate manifold integration in OEM or compact analytical systems
By combining smart engineering with proven physics, MicroMeter provides high-performance gas measurement in a footprint previously unattainable for subminiature devices.
Precision for Subminiature Applications
Engineers increasingly require accurate flow control in micro-scale systems, from portable analytical instruments to miniature medical devices. MicroMeter meets this demand by delivering:
- Reliable detection of low and ultra-low flows
- Repeatable measurements across broad dynamic ranges
- Consistent performance for OEM systems, vacuum devices, and portable setups
Its compact design ensures that even space-restricted systems benefit from high-level precision, enabling innovative solutions without design compromises.
Applications That Benefit from MicroMeter
MicroMeter’s subminiature size and advanced thermal technology make it versatile for numerous applications:
- Semiconductor Manufacturing: Precise gas delivery in miniature chambers and microreactors.
- Analytical Instruments: Flow control for mass spectrometers, chromatographs, and sensor calibration.
- Medical Devices: Stable and safe gas measurement in portable or wearable instruments.
- Vacuum Systems: Accurate flow measurement at low pressures in tight setups.
- Portable or Handheld Equipment: Compact size allows integration without compromising space or accuracy.
In every case, MicroMeter combines miniature form factor with full-scale performance, supporting innovation in environments where space is at a premium.
Advantages of Digital Thermal Mass Flow Measurement
The MicroMeter’s digital thermal design delivers significant benefits for modern high-tech systems:
- Direct Mass Flow Measurement: Independent of pressure or temperature variations, ensuring reliable readings.
- Enhanced Data Accuracy: Digital processing smooths signals for integration with automated systems.
- Simplified Calibration: Maintains stability across diverse operating conditions.
- Compact Efficiency: Delivers high performance in a subminiature, energy-efficient package.
This combination makes MicroMeter ideal for applications where even slight deviations could compromise results, providing engineers with confidence and control in the smallest of spaces.
Why Choose Pneucleus Technologies
Pneucleus Technologies brings decades of expertise in precision gas flow instrumentation. The MicroMeter reflects the company’s commitment to:
- Innovative engineering for space-constrained applications
- Durable and reliable construction for long-term operation
- Seamless integration with OEM, laboratory, and analytical systems
- Customer-focused solutions to meet specific application needs
With MicroMeter, customers gain more than just a meter—they gain precision, reliability, and flexibility in a subminiature design.