Precision Gas Flow Measurement for Space-Constrained Applications
In modern laboratories, cleanrooms, and industrial environments, every inch of space matters. The MetaMeter™ Low-Profile Mass Flow Meter from Pneucleus Technologies is engineered to deliver high-precision gas measurement in a compact design, ensuring that engineers and researchers no longer have to compromise between performance and workspace efficiency.
By combining advanced thermal sensing technology with a low-profile footprint, MetaMeter provides accurate, repeatable, and stable gas flow measurement in environments where space is limited and performance cannot be sacrificed.
Features & Benefits
- Flow Range: Customer specified Up to 20,000 SCCM
- Linearity Error: 0.5% FS
- Repeatability: 0.15% FS
- Response Time: 20ms
PRODUCT SPECIFICATIONS (Standard)
NOTE: Ask Us About Specification Enhancement
| Performance | |
|---|---|
| Flow Ranges | Any Customer Specified Flow Range Up to 20,000 SCCM |
| Linearity | ± 0.5 - 1.0% of Full Scale (Typical) |
| Repeatability & Hysteresis | ± 0.15% FS |
| Response Time | 20 msec (Typical, from 0%-100 FS) |
| Temperature Coefficient | 0.09% / ºC from 20ºC Ambient Cal Temp |
| Fluid Requirements: | |
| Calibration Gas | Any, Non-Corrosive, Customer Specified |
| Pressure Range | Up To 100 psiA, Cal Pressure: 14.7 psiA (Typical) |
| Internal Leakage | 10-5 @ 1, 30 and 100 psi (He) |
| External Leakage | 2 x 10-6 sccm (He) |
| Electrical Requirements: | |
| Input Voltage (single supply) | 12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%) |
| Power Consumption | 0.75 Watts Maximum |
| Output Voltage/Signal | 0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable) |
| Environmental Requirements: | |
| Operating Ambient Temp. | 0-50ºC |
| Storage Temperature | -40 to 70ºC |
| Humidity Range | 5% - 95% (Relative, non-condensing) |
| Nominal Temperature | 20ºC ± 5ºC |
| Mechanical Configuration: | |
| Input/Output Ports | 5/16"-24 tpi |
| Dimensions | L: 5.85” W: 1.50” H: 2.65” |
| Weight | 7.1 oz |
| Construction (wetted materials): | |
| Manifold | Nickel Plated Aluminum |
| O-Rings | Fluorocarbon (Viton®), others at additional cost |
| Flow Sensor | Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only) |
Why a Low-Profile Mass Flow Meter Matters
Traditional gas flow meters often occupy valuable space, making integration into rack-mounted systems, portable analyzers, or OEM devices challenging. MetaMeter solves this problem by offering a compact solution without compromising accuracy or reliability.
- Optimized for Space: Fits seamlessly into space-sensitive layouts and compact systems.
- Precision Measurement: Maintains high accuracy across a wide dynamic range, ensuring reliable results in critical processes.
- Quick Integration: Streamlined installation allows for rapid deployment and minimal modification to existing systems.
- Long-Term Stability: Designed for consistent performance over extended operation periods.
Key Advantages of MetaMeter
MetaMeter is more than a compact gas flow meter, it’s a solution that improves workflow efficiency, system integration, and operational reliability:
- Low-Profile Construction: Ideal for rack-mounted equipment, OEM integration, and portable devices.
- Digital Thermal Sensing: Accurate and stable measurement independent of temperature and pressure variations.
- High Repeatability: Ensures consistent results across different flow rates, reducing recalibration needs.
- Low Pressure Drop: Maintains system efficiency while minimizing disruption to process flow.
- Durable Build: Robust materials for long-term reliability in demanding environments.
- Seamless Digital Integration: Supports modern control systems and automated workflows with versatile output options.
Applications in Space-Constrained Environments
The MetaMeter’s compact design and precision make it suitable for a variety of industries and research fields:
- Semiconductor Processing: Ensures reliable gas delivery in processes such as thin-film deposition and wafer fabrication.
- Biotechnology & Medical Devices: Maintains precise and stable gas flow for bioreactors, diagnostics, and analytical instruments.
- Environmental Test Systems: Supports accurate digital readings in confined setups for research and monitoring.
- Portable Gas Analysis: Enables high-precision measurement in compact, mobile instrumentation.
- OEM Integration: Simplifies integration into specialized equipment without sacrificing accuracy or performance.
- Laboratory Research: Balances high accuracy with space-saving designs, ideal for modern analytical labs.
Advantages Over Conventional Flow Meters
Compared to traditional mass flow meters, MetaMeter provides:
- Space-Efficient Design: Integrates easily into tight systems and rack layouts.
- Digital Accuracy & Stability: Reliable readings for advanced monitoring and automated processes.
- Versatile Gas Compatibility: Supports a wide range of gases and application environments.
- Reduced Maintenance: Durable construction and efficient design minimize downtime and recalibration.
- Simplified Integration: User-friendly mounting, low-profile footprint, and digital outputs facilitate seamless system setup.
Enhancing Workflow Efficiency
MetaMeter is designed to streamline system design and operation:
- Allows more functionality within limited space, improving productivity and flexibility.
- Supports digital communication protocols, enabling real-time monitoring, performance analysis, and compliance assurance.
- Reduces installation complexity and system design compromises.
Reliability and Longevity
Pneucleus Technologies ensures that each MetaMeter is rigorously tested for accuracy, stability, and long-term reliability, providing engineers and researchers with a dependable solution for continuous operation in demanding conditions.
Seamless System Integration
The MetaMeter’s design supports easy integration into existing setups:
- Minimal installation modifications required.
- Compact footprint for space-limited systems.
- Digital output options for effortless data collection and system automation.
Why Pneucleus Leads in Gas Flow Measurement
Pneucleus Technologies combines innovation, quality, and engineering expertise in precision gas flow instruments. The MetaMeter Low-Profile Mass Flow Meter exemplifies this commitment, offering:
- High-precision, low-profile design for space-sensitive applications.
- Durable construction for consistent long-term performance.
- Flexible integration options for laboratories, industrial systems, and OEM equipment.
With MetaMeter, engineers and researchers gain confidence in every measurement, while optimizing space and workflow efficiency in their systems.