Mass Flow Controllers

MicroFlo L: 2.04″ W: 1.50″ H: 1.85″ Learn More [1]		MediFlo L: 2.8″ W: 1.50″ H: 5.50″ Learn More [2]		MetaFlo L: 5.5″ W: 1.50″ H: 2.8″ Learn More [3]

Precision Models
Flow Range*	Up to 2000 sccm	Up to 20 SLPM		Up to 20 SLPM
Linearity Error:**	±0.5 – 1.0% FS	±0.5 – 1.0% FS		0.5 – 1.0% FS
Repeatability	0.15% FS	0.15% FS		0.15% FS
Response Time	40 msec	150 msec		150 msec
OEM (Economical) Models
Flow Range*	Up to 500sccm	Up to 20 SLPM		Up to 20 SLPM
Linearity Error:	1.0 – 3.0% FS	1.0 – 3.0% FS		1.0 – 3.0% FS
Repeatability	0.15% FS	0.15% FS		0.15% FS
Response Time	40 msec	150 msec		150 msec

* Customer-Specified
** Customer-Specified with Cost Impact