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[1]
ManiFlo
L: 2.0” W: 1.5” H: 1.85″
Learn More [1]
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[2]
MicroFlo
L: 2.04″ W: 1.50″ H: 1.85″
Learn More [2][/vc_column_text][/vc_column_inner][vc_column_inner el_class=”inner-products-box px-3 mb-4″ width=”1/4″ css=”.vc_custom_1734590781585{margin-bottom: 30px !important;padding-top: 20px !important;padding-bottom: 20px !important;}”][vc_column_text css=”.vc_custom_1748600445164{margin-bottom: 0px !important;}”]
[3]
MediFlo
L: 2.8″ W: 1.50″ H: 5.50″
Learn More [3]
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[4]
MetaFlo
L: 5.5″ W: 1.50″ H: 2.8″
Learn More [4]
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| Precision Models | ||||
| Flow Range* | Up to 2000 sccm | Up to 20 SLPM | Up to 20 SLPM | |
| Linearity Error:** | ±0.5 – 1.0% FS | ±0.5 – 1.0% FS | 0.5 – 1.0% FS | |
| Repeatability | 0.15% FS | 0.15% FS | 0.15% FS | |
| Response Time | 40 msec | 150 msec | 150 msec | |
| OEM (Economical) Models | ||||
| Flow Range* | Up to 500sccm | Up to 20 SLPM | Up to 20 SLPM | |
| Linearity Error: | 1.0 – 3.0% FS | 1.0 – 3.0% FS | 1.0 – 3.0% FS | |
| Repeatability | 0.15% FS | 0.15% FS | 0.15% FS | |
| Response Time | 40 msec | 150 msec | 150 msec | |
* Customer-Specified
** Customer-Specified with Cost Impact
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