Features & Benefits
- Flow Range: Customer Specified Up to 6000 SCCM
- Linearity Error: 0.5 – 1.0% FS
- Repeatability: ± 0.15% FS
- Response Time: 40 msec
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View MicroFlo and MediFlo Datasheets (with ordering matrices)
Product Specifications (Standard)
NOTE: Ask Us About Specification Enhancement
| Performance | |
|---|---|
| Flow Ranges | Any Customer Specified Flow Range Up to 6000 SCCM |
| Linearity | ± 0.5 - 1.0% of Full Scale (Typical) |
| Repeatability & Hysteresis | ± 0.08% FS (Typical) |
| Response Time | 40 msec (Typical, from 2%-100 FS) |
| Temperature Coefficient | 0.09% / ºC from 20ºC Ambient Cal Temp |
| Fluid Requirements: | |
| Calibration Gas | Any, Non-Corrosive, Customer Specified |
| Pressure Range | Up To 100 psiA, Cal Pressure: 40 psiA (Typical) |
| Internal Leakage | 10-5 @ 1, 30 and 100 psi (He) |
| External Leakage | 2 x 10-6 sccm (He) |
| Electrical Requirements: | |
| Input Voltage (single supply) | 12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%) |
| Power Consumption | 3.0 Watts Maximum |
| Control & Output Voltage/Signal | 0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable) |
| Environmental Requirements: | |
| Operating Ambient Temp. | 0-50ºC |
| Storage Temperature | -40 to 70ºC |
| Humidity Range | 5% - 95% (Relative, non-condensing) |
| Nominal Temperature | 20ºC ± 5ºC |
| Mechanical Configuration: | |
| Input/Output Ports | 10-32 Threaded (Others, Consult Factory) |
| Dimensions | L: 2.0” W: 1.5” H: 1.85” |
| Weight | 5.4 oz |
| Construction (wetted materials): | |
| Manifold | Nickel Plated Aluminum |
| O-Rings | Fluorocarbon (Viton®), others at additional cost |
| Valve Components | Brass 360, AISI 300 series, 430 FR Stainless Steel |
| Flow Sensor | Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only) |