Features & Benefits
- Flow Range: Customer Specified Up to 6000 SCCM
- Linearity Error: 0.5 – 1.0% FS
- Repeatability: ± 0.15% FS
- Response Time: 40 msec
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View MicroFlo and MediFlo Datasheets (with ordering matrices)
Product Specifications (Standard)
NOTE: Ask Us About Specification Enhancement
| Performance | |
|---|---|
| Flow Ranges | Any Customer Specified Flow Range Up to 6000 SCCM |
| Linearity | ± 0.5 - 1.0% of Full Scale (Typical) |
| Repeatability & Hysteresis | ± 0.08% FS (Typical) |
| Response Time | 40 msec (Typical, from 2%-100 FS) |
| Temperature Coefficient | 0.09% / ºC from 20ºC Ambient Cal Temp |
| Fluid Requirements: | |
| Calibration Gas | Any, Non-Corrosive, Customer Specified |
| Pressure Range | Up To 100 psiA, Cal Pressure: 40 psiA (Typical) |
| Internal Leakage | 10-5 @ 1, 30 and 100 psi (He) |
| External Leakage | 2 x 10-6 sccm (He) |
| Electrical Requirements: | |
| Input Voltage (single supply) | 12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%) |
| Power Consumption | 3.0 Watts Maximum |
| Control & Output Voltage/Signal | 0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable) |
| Environmental Requirements: | |
| Operating Ambient Temp. | 0-50ºC |
| Storage Temperature | -40 to 70ºC |
| Humidity Range | 5% - 95% (Relative, non-condensing) |
| Nominal Temperature | 20ºC ± 5ºC |
| Mechanical Configuration: | |
| Input/Output Ports | 10-32 Threaded (Others, Consult Factory) |
| Dimensions | L: 2.0” W: 1.5” H: 1.85” |
| Weight | 5.4 oz |
| Construction (wetted materials): | |
| Manifold | Nickel Plated Aluminum |
| O-Rings | Fluorocarbon (Viton®), others at additional cost |
| Valve Components | Brass 360, AISI 300 series, 430 FR Stainless Steel |
| Flow Sensor | Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only) |
Pneucleus Technologies offers MicroFlo Mass Flow Controllers (MFCs), which are subminiature mass flow controllers that provide precise control over gas flow in various industrial applications. These compact and high-performance controllers assure exceptional accuracy, fast response times, and reliable repeatability, suitable for environments where space and precision are critical. The MicroFlo mass flow controller integrates seamlessly into systems with limited space, offering a customizable flow range to meet specific application requirements. With their robust construction, outstanding stability, and flexible control options, they ensure consistent and accurate gas delivery, making them essential for critical processes in industries like electronics, medical devices, and scientific research.
Beneficial Features of MicroFlo Mass Flow Controllers
Below are the key features that make these MFCs a reliable choice for various industries:
- Customizable flow range: Tailored to meet specific application needs, MicroFlo MFCs offer a flow range up to 6000 SCCM, accommodating diverse gas flow requirements.
- High accuracy: With a linearity error between 0.5% and 1.0% of full scale, these subminiature mass flow controllers ensure precise gas flow measurements, critical for sensitive processes.
- Exceptional repeatability: Achieving repeatability and hysteresis of ±0.08% FS, MicroFlo MFCs provide consistent performance, minimizing deviations in gas flow control.
- Rapid response time: Designed for dynamic applications, these subminiature mass flow controllers offer a response time of 40 milliseconds from 2% to 100% of full scale.
- Wide operating temperature range: MicroFlo MFCs function effectively within an ambient temperature range of 0°C to 50°C. This ensures reliable operation in various environmental conditions.
- Versatile electrical compatibility: Supporting input voltages of 12V, 15V, and 24V, and offering control and output signals such as 0-5 VDC, 0-10 VDC, 1-5 VDC, 4-20 mA, and RS232 (addressable), these controllers integrate seamlessly into diverse systems.
- Compact design: With dimensions of 2.0″ x 1.5″ x 1.85″ and weighing just 5.4 oz, MicroFlo MFCs are ideal for applications where space is limited.
- Durable construction: Featuring nickel-plated aluminum manifolds and fluorocarbon (Viton®) O-rings, these controllers are built to withstand demanding environments.
- Low power consumption: Operating at a maximum power consumption of 3.0 watts, MicroFlo MFCs are energy-efficient, reducing operational costs.
- Leak integrity: Ensuring internal leakage of 10^-5 @ 1, 30, and 100 psi (He) and external leakage of 2 x 10^-6 sccm (He), these controllers maintain gas purity and system integrity.
Industry-Wide Applications and Use Cases
MicroFlo mass flow controllers are widely used across the following industries:
- Semiconductor manufacturing: MicroFlo MFCs are used in semiconductor fabrication processes where precise gas delivery is vital. They help regulate the flow of gases used in deposition, etching, and ion implantation, ensuring the accuracy and consistency of critical manufacturing steps.
- Medical device production: In medical device manufacturing, MicroFlo MFCs ensure accurate control of gases during processes like sterilization, testing, and device assembly.
- Scientific research and laboratories: These MFCs are ideal for laboratory settings, where researchers rely on exact gas flow measurements for experiments involving combustion, gas analysis, or chemical reactions.
- Environmental testing and gas analysis: These MFCs are extensively used in gas detection and environmental testing applications. They provide precise gas flow regulation for systems that monitor air quality, pollutant levels, and other environmental factors.
- Hydrogen fuel cells: In the development and testing of hydrogen fuel cells, these MFCs control the flow of hydrogen and other gases, ensuring efficient and accurate operations during testing and performance evaluations.
- Process control in chemicals and pharmaceuticals: In the chemical and pharmaceutical industries, these MFCs ensure that the right amounts of gases are used in the production and testing phases, improving process reliability and product quality.
- Aerospace and defense: MicroFlo MFCs are used in aerospace and defense applications where high precision and reliability in controlling gas flows are required for systems like propulsion, testing, and environmental control.
Customization & Integration Options
MicroFlo Mass Flow Controllers by Pneucleus Technologies are designed to offer flexibility and adaptability to meet the specific needs of various applications. Key customization and integration features include:
- Versatile control signals: These controllers support various control and output signals, including 0-5 VDC, 1-5 VDC, 4-20 mA, and RS232 (addressable). This versatility allows for seamless integration into different systems and facilitates easy communication with other equipment.
- Modular Gas Mixing Systems: Pneucleus offers modular gas mixing systems that adapt to your process. Whether adjusting ppm-level traces or balancing large flows, our equipment provides quick, precise, and repeatable process control.
Get Started with Precision Gas Flow Control Today!
Looking for a reliable and compact solution for precise gas flow control? MicroFlo Mass Flow Controllers by Pneucleus Technologies offer unmatched accuracy, versatility, and space-saving design. Contact Us Today to discuss how we can customize a solution to meet your needs, or Request a Quote for your next project!
FAQs
How does the MicroFlo MFC ensure consistent performance under fluctuating environmental conditions?
These MFCs are designed to operate efficiently in temperatures ranging from 0°C to 50°C, with robust construction to resist temperature fluctuations. Its internal sensors and algorithms continuously adjust to changes in pressure and temperature.
How do the MFC’s improve gas flow accuracy in multi-zone applications?
For multi-zone applications, the MFCs provide highly stable and repeatable flow control, ensuring that gas distribution across different zones remains uniform.
Can I integrate the MicroFlo MFC with a gas mixing system for precise gas composition control?
Yes, MFCs can be easily integrated with gas mixing systems, enabling precise control over gas composition. With the ability to customize flow rates for multiple gases, they ensure that the correct mixture is maintained with high accuracy and consistency for critical applications.