Address: 19A Clinton Drive, Hollis, NH 03049 USA

Features & Benefits

  • Flow Range: Customer specified Up to 20,000 SCCM
  • Linearity Error: 0.5 – 1.0% FS
  • Repeatability: 0.15% FS
  • Response Time: 40ms

 

MetaFlo

Product Specifications (Standard)

NOTE: Ask Us About Specification Enhancement

Performance
Flow RangesAny Customer Specified Flow Range Up to 20,000 SCCM
Linearity± 0.5 - 1.0% of Full Scale (Typical)
Repeatability & Hysteresis± 0.15% FS
Response Time40 msec (Typical, from 2%-100 FS)
Temperature Coefficient0.09% / ºC from 20ºC Ambient Cal Temp
Fluid Requirements:
Calibration GasAny, Non-Corrosive, Customer Specified
Pressure RangeUp To 100 psiA, Cal Pressure: 40 psiA (Typical)
Internal Leakage10-5 @ 1, 30 and 100 psi (He)
External Leakage2 x 10-6 sccm (He)
Electrical Requirements:
Input Voltage (single supply)12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%)
Power Consumption3.0 Watts Maximum
Control & Output Voltage/Signal0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable)
Environmental Requirements:
Operating Ambient Temp.0-50ºC
Storage Temperature-40 to 70ºC
Humidity Range5% - 95% (Relative, non-condensing)
Nominal Temperature20ºC ± 5ºC
Mechanical Configuration:
Input/Output Ports5/16"-24 tpi
DimensionsL: 5.85” W: 1.50” H: 2.65”
Weight10.3 oz
Construction (wetted materials):
ManifoldNickel Plated Aluminum
O-RingsFluorocarbon (Viton®), others at additional cost
Valve ComponentsBrass 360, AISI 300 series, 430 FR Stainless Steel
Flow SensorCeramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only)

When it comes to high-precision gas flow control, MetaFlo Mass Flow Controllers (MFCs) from Pneucleus Technologies set the standard for exceptional performance, versatility, and reliability. These high-flow mass flow controllers are designed to deliver precise control in environments where accuracy and quick response times are crucial. The MetaFlo MFCs are ideal for a wide range of applications, including industrial gas systems, laboratory automation, with flow ranges up to 20,000 SCCM. With compatibility across various signal formats, MetaFlo controllers ensure seamless integration into both new and existing systems. Their robust construction and flexible control options make them perfect for industries where precision and reliability are paramount.

Key Features and Benefits MetaFlo Mass Flow Controllers

The MetaFlo Mass Flow Controllers are the key features that set these controllers apart:

  • Accuracy: Whether you’re dealing with minute adjustments or large flow variations, these controllers provide unparalleled accuracy, ensuring that every aspect of your flow system operates with precision.
  • Fast Response: With a typical response time of just 40 msec (from 2% to 100% FS), the controllers react quickly to flow changes. This fast response time ensures smooth transitions in processes, maintaining consistent flow even during sudden changes in demand.
  • Wide Flow Range: These controllers support a customer-specified flow range of up to 20,000 SCCM, making them highly adaptable for a variety of applications. Whether you’re working in a low-volume laboratory setting or a high-volume industrial environment, they can be customized to meet your exact requirements.
  • InSitu-Sense™ Mass Flow Sensor: The InSitu-Sense™ sensor ensures precise, instantaneous mass flow measurements by using advanced MEMS thermal transfer technology. The key advantage is its direct contact with the gas stream, which eliminates common-mode errors. This results in enhanced repeatability, faster response times, and superior thermal stability, making it ideal for precise mass flow control in non-corrosive gas applications.
  • Tri-Planar™ Proportional Valve: Pneucleus Technologies’ Tri-Planar™ proportional valve technology precisely controls mass flow with its innovative patented plunger design. With six orifice configurations and four power settings, the Tri-Planar™ valve guarantees outstanding flow stability and resolution while consuming minimal power and requiring minimal differential pressure, making it ideal for systems needing quick and reliable adjustments.
  • Robust Build: Durability is a core feature of every MetaFlo Mass Flow Controller. Key components, such as the manifold, are made of Nickel-Plated Aluminum, and the O-rings are crafted from Fluorocarbon (Viton®), providing resistance to wear and tear. The valve components, including Brass 360 and AISI 300 series, are designed to offer exceptional durability in even the harsh environments, ensuring your systems remain operational under demanding conditions.
  • Compact Form Factor: Despite their high-flow capabilities, the MetaFlo Mass Flow Controllers are designed in a low-profile form factor, making them easy to integrate into tight spaces without compromising on performance.

Applications of MetaFlo Mass Flow Controllers

The MetaFlo Mass Flow Controllers are ideal for a variety of industries that require precise and reliable gas flow control, including:

  • Industrial Gas Systems: Whether you are controlling non-corrosive gases in semiconductor manufacturing or chemical processing, our controllers deliver consistent and reliable gas flow, ensuring process stability and efficiency.
  • Process Control: For applications where precise flow control is critical, such as in manufacturing or research, these controllers provide high-precision metering to ensure process integrity and product consistency.
  • Lab Automation: Laboratories require exacting standards for gas flow to ensure accurate research results. Our high flow mass flow controllers are perfect for lab automation systems, providing reliable control even in small-scale applications.
  • Gas Mixing for High-Flow Environments: When mixing gases in environments requiring high-flow rates, such as in large-scale industrial applications, then our controllers ensure that each gas is delivered with precision and consistency, maintaining quality and efficiency.

Flexible Integration & Customization

One of the standout advantages of MetaFlo Mass Flow Controllers is their ability to integrate into your existing systems seamlessly. The MetaFlo Mass Flow Controllers offer:

  • Customizable Flow Range: The flow range can be tailored to your specific needs, even if you desire zooming-in on a small flow range within a larger flow range. We can configure multiple ranges onto a single flow controller, up to 20,000 SCCM. For instance, Cal-A could be 0-5Vcont = 0-20,000 sccm and Cal-B could be 0-5Vcont = 4000-8000 SCCM.
  • Signal Compatibility: The controllers support a wide variety of signal formats, ensuring that they work seamlessly with your control systems. Whether you need analog signals or serial communication, these controllers offer the flexibility to match your system.
  • Calibration Gas & Output Signal: Choose from a range of calibration gases and output signal types to suit your application. Customizing these parameters ensures you get the highest performance for your specific needs.
  • Power Requirements: The MetaFlo Mass Flow Controllers are adaptable to different power inputs, making them a versatile choice for systems with varying electrical specifications.

 

For precise, reliable, and adaptable gas flow control, MetaFlo Mass Flow Controllers from Pneucleus Technologies are the ideal solution. With cutting-edge technology and customizable features, they ensure optimal performance across a variety of applications. Contact Pneucleus today to configure your MetaFlo Mass Flow Controller, request a personalized quote, or speak with our engineering team for support in selecting the right model for your specific needs.

FAQs

Can MetaFlo controllers be used in corrosive gas applications?

MetaFlo Mass Flow Controllers are specifically designed for non-corrosive gas applications. For corrosive gas environments, it is recommended to consult with our team to discuss specialized options or protective coatings to ensure compatibility.

Are MetaFlo controllers suitable for laboratory settings?

Yes, MetaFlo Mass Flow Controllers are perfectly suited for laboratory environments, particularly in applications that require precise high-flow control and quick response times. They are widely used in lab automation and research for gas flow regulation in experiments.

What types of signal outputs are compatible with MetaFlo controllers?

MetaFlo Mass Flow Controllers are highly versatile, supporting a wide range of signal formats, including voltage control, current control, and serial communication. This allows easy integration with various control systems for seamless operation in diverse setups.

How do MetaFlo controllers maintain accuracy in fluctuating environmental conditions?

MetaFlo Mass Flow Controllers maintain accuracy in fluctuating conditions due to its InSitu-Sense™ sensor, which directly measures mass flow by utilizing MEMS thermal transfer technology. This minimizes errors caused by external variables like pressure and temperature changes.

What power requirements do MetaFlo Mass Flow Controllers have?

MetaFlo controllers are adaptable to a range of power inputs, making them flexible for use in systems with varying electrical specifications. Their low power consumption ensures they can operate efficiently in most industrial and laboratory settings.

Can MetaFlo controllers be integrated with existing gas delivery systems?

Yes, MetaFlo Mass Flow Controllers are designed for easy integration into existing systems. Their customizable flow range, signal compatibility, and flexible calibration options make them an ideal choice for enhancing gas flow control in pre-existing setups.