MicroFloL: 2.04″ W: 1.50″ H: 1.85″ |
MediFloL: 2.8″ W: 1.50″ H: 5.50″ |
MetaFloL: 5.5″ W: 1.50″ H: 2.8″ |
||
 |
 |
 |
| Precision Models | ||||
| Flow Range* | Up to 2000 sccm | Up to 20 SLPM | Up to 20 SLPM | |
| Linearity Error:** | ±0.5 – 1.0% FS | ±0.5 – 1.0% FS | 0.5 – 1.0% FS | |
| Repeatability | 0.15% FS | 0.15% FS | 0.15% FS | |
| Response Time | 40 msec | 150 msec | 150 msec | |
| OEM (Economical) Models | ||||
| Flow Range* | Up to 500sccm | Up to 20 SLPM | Up to 20 SLPM | |
| Linearity Error: | 1.0 – 3.0% FS | 1.0 – 3.0% FS | 1.0 – 3.0% FS | |
| Repeatability | 0.15% FS | 0.15% FS | 0.15% FS | |
| Response Time | 40 msec | 150 msec | 150 msec | |
* Customer-Specified
** Customer-Specified with Cost Impact
