MicroMeterL: 2.04″ W: 1.50″ H: 1.87″ |
MediMeterL: 2.8″ W: 1.50″ H: 5.63″ |
MetaMeterL: 5.5″ W: 1.50″ H: 2.8″ |
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| Digital Models | ||||
| Flow Range | Up to 2000sccm | Up to 20 SLPM | Up to 20 SLPM | |
| Linearity Error: | 0.5% FS | 0.5% FS | 0.5% or 1.0% FS* | |
| Repeatability | 0.15% FS | 0.15% FS | 0.15% FS | |
| Response Time | 40ms | 150ms | 100ms | |